Wafer Universe is now providing carriers from black quartz. This material has various advantages for semiconductor applications due to similar properties as fused silica.
The main advantages in comparison to common quartz glasses are the black opacity and IR blockage. These properties enable automatic loading of wafers by common wafer handling systems (IR-controlled).
Black quartz offers high temperature resistance (> 1150°C) combined with a low thermal expansion (0.57 ppm/K at 20-200°C). This enable a wide range of opportunities for applications where heat dissipation is an issue. With a low trace element content of less than 50 ppm impurities, this material belongs to the high purity quartz glasses. Additionally black quartz is resistant to most chemicals such as acids and solvents.
Carriers from black quartz are available in 150 mm and 200 mm diameter and a thickness of 675 µm with a lead time of less than one week.