Carriers from black quartz enable automatic loading of wafers by common wafer handling systems (IR-controlled) caused by their black opacity and IR blockage. This unique material offers various advantages for semiconductor applications due to similar properties as fused silica. 

150 mm

  • material: Black Quartz
  • diameter:150.0 ±0.2 mm
  • cte: 0.57 ppm/K
  • thickness: 675 ± 10
  • edge exclusion: 5 mm
  • polishing: double side polished
  • flat: SEMI (57.5 mm)
  • ttv: < 5 µm
  • packaging: cleanroom packed
  • material data sheet

article number: CBQ-150×0675-BGQ-01

200 mm

  • material: Black Quartz
  • diameter: 200.0 ±0.2 mm
  • cte: 0.57 ppm/K
  • thickness: 675 ± 10
  • edge exclusion: 5 mm
  • polishing: double side polished
  • SEMI flat /notch: notch according to SEMI
  • ttv: < 5 µm
  • packaging: cleanroom packed
  • material data sheet

article number: CBQ-200×0675-BQG-01

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FOR LASER/MECHANICAL RELEASE

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