article number: CBQ-150×0675-BGQ-01
Carriers from black quartz enable automatic loading of wafers by common wafer handling systems (IR-controlled) caused by their black opacity and IR blockage. This unique material offers various advantages for semiconductor applications due to similar properties as fused silica.
General properties
- material: Black Quartz
- cte: 0.57 ppm/K
- polishing: double side polished
- ttv: < 5 µm
- edge exclusion: 5 mm
- thickness: 675 ± 10
- packaging: cleanroom packed
- material data sheet
150 mm
- diameter:150.0 ±0.2 mm
- SEMI flat /notch: 57.5 mm
200 mm
- diameter: 200.0 ±0.2 mm
- SEMI flat /notch: notch according to SEMI
article number: CBQ-200×0675-BQG-01
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Additional products
BOROSILICATE WAFERS
BOROSILICATE WAFERS
MDF POLISHING GRADE
ALKALINE FREE GLASS WAFERS
QUARTZ WAFERS
SEMICONDUCTOR GRADE
CARRIER WAFER
FOR LASER / MECHANICAL RELEASE
SI-ADAPTER CARRIER
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Customized designs are available through Plan Optik AG.