Carriers from black quartz enable automatic loading of wafers by common wafer handling systems (IR-controlled) caused by their black opacity and IR blockage. This unique material offers various advantages for semiconductor applications due to similar properties as fused silica. 

General properties

  • material: Black Quartz
  • cte: 0.57 ppm/K
  • polishing: double side polished
  • ttv: < 5 µm

150 mm

  • diameter:150.0 ±0.2 mm
  • SEMI flat /notch: 57.5 mm

article number: CBQ-150×0675-BGQ-01

200 mm

  • diameter: 200.0 ±0.2 mm
  • SEMI flat /notch: notch according to SEMI

article number: CBQ-200×0675-BQG-01

Ask for quotation!

Have you found a suitable product? Contact us now for an individual offer.

Additional products

Do you need customization?

Customized designs are available through Plan Optik AG.