article number: CBQ-150×0675-BGQ-01
Carriers from black quartz enable automatic loading of wafers by common wafer handling systems (IR-controlled) caused by their black opacity and IR blockage. This unique material offers various advantages for semiconductor applications due to similar properties as fused silica.
150 mm
- material: Black Quartz
- diameter:150.0 ±0.2 mm
- cte: 0.57 ppm/K
- thickness: 675 ± 10
- edge exclusion: 5 mm
- polishing: double side polished
- flat: SEMI (57.5 mm)
- ttv: < 5 µm
- packaging: cleanroom packed
- material data sheet
200 mm
- material: Black Quartz
- diameter: 200.0 ±0.2 mm
- cte: 0.57 ppm/K
- thickness: 675 ± 10
- edge exclusion: 5 mm
- polishing: double side polished
- SEMI flat /notch: notch according to SEMI
- ttv: < 5 µm
- packaging: cleanroom packed
- material data sheet
article number: CBQ-200×0675-BQG-01
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