Additional information
| material | black quartz |
|---|---|
| diameter | 200 mm |
| diameter tolerance | ± 0.2 mm |
| thickness | 675 µm |
| thickness tolerance | ± 10 µm |
| polishing | double side polished |
| ttv | < 5 µm |
| notch | according to SEMI |
| edge exclusion | 5 mm |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |
