Wafers from semiconductor grade quartz (amorphous) are used in semiconductor processing, solar and industrial applications as well as for thin film coatings. Main feature is the high chemical purity making it a CMOS compatible material combined with excellent mechanical and optical properties.
High Purity Fused Silica wafers provide a very low metal contamination as well as high transmission for UV light. The wafers are made for UV optical but also semiconductor applications. The material features extremely low trace metal and OH content, enabling the use in high thermal processing. In addition the UHP fused silica has a low coefficient of thermal expansion (cte) making it suitable for optical applications in alternating temperatures.
