Additional information
| material | high purity fused silica |
|---|---|
| cte | 0.57 ppm/K |
| diameter | 150 mm |
| diameter tolerance | ± 0.3 mm |
| thickness | 675 µm |
| thickness tolerance | ± 10 µm |
| polishing | double side polished |
| roughness | < 0.5 nm (Ra) |
| ttv | < 10 µm |
| bow | < 60 µm |
| flat | according to SEMI (57.5 mm) |
| surface | scratch-dig 20-10 according MIL-PRF-13830 |
| edge exclusion | 6 mm |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |
