| thickness (μm) | article number | shop |
| 500 | MDF-100×0500-B33-01 |  |
MDF polished wafers are treated by an enhanced polishing process (Micro Damage Free). These wafers are specifically developed for chemical patterning processes (wet-etching) leading to higher yield due to reduced defect rate.
Their extremely low sub-nanometer surface roughness makes them ideally suited for direct bonding (fusion bonding).
100 mm WAFERS
- material: Borofloat33® glass
- cte: 3.25 ppm/K (adapted to Si)
- diameter: 100 mm
- diameter tolerance: ± 0.3 mm
- thickness tolerance: ± 10 μm
- polishing: double side MDF polished
- surface roughness (Ra): < 0.5 nm
- ttv: < 10 μm
- bow: < 30 µm
- flat: according to SEMI (32.5 mm)
- surface: sub-surface damaging reduction > 99%
- edge exclusion: 6 mm
- packing: clean room packed under ISO 6 conditions according to ISO 14644
- packing units: 10 pcs, 25 pcs
- material data sheet
150 mm WAFERS
- material: Borofloat33® glass
- cte: 3.25 ppm/K (adapted to Si)
- diameter: 150 mm
- diameter tolerance: ± 0.3 mm
- thickness tolerance: ± 10 μm
- polishing: double side MDF polished
- surface roughness (Ra): < 0.5 nm
- ttv: < 10 μm
- bow: < 60 µm
- flat: according to SEMI (57.5 mm)
- surface: sub-surface damaging reduction > 99%
- edge exclusion: 6 mm
- packing: clean room packed under ISO 6 conditions according to ISO 14644
- packing units: 10 pcs, 25 pcs
- material data sheet
| thickness (μm) | article number | shop |
| 500 | MDF-150×0500-B33-01 | |
200 mm WAFERS
- material: Borofloat33® glass
- cte: 3.25 ppm/K (adapted to Si)
- diameter: 200 mm
- diameter tolerance: ± 0.3 mm
- thickness tolerance: ± 10 μm
- polishing: double side MDF polished
- surface roughness (Ra): < 0.5 nm
- ttv: < 10 μm
- bow: < 80 µm
- notch: according to SEMI
- surface: sub-surface damaging reduction > 99%
- edge exclusion: 6 mm
- packing: clean room packed under ISO 6 conditions according to ISO 14644
- packing units: 10 pcs, 25 pcs
- material data sheet
| thickness (μm) | article number | shop |
| 500 | MDF-200×0500-B33-01 | |
Additional products
BOROFLOAT33® GLASS WAFERS
REGULAR POLISHING GRADE
ALKALINE FREE GLASS WAFERS
QUARTZ WAFERS
SEMICONDUCTOR GRADE
QUARTZ WAFERS
HP FUSED SILICA
CARRIER WAFER
FOR LASER / MECHANICAL RELEASE
BLACK QUARTZ CARRIER
SI-ADAPTER CARRIER
GLASS-ADAPTER CARRIER
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