Additional information
material | semiconductor grade quartz |
---|---|
cte | 0.59 ppm/K |
diameter | 150 mm |
diameter tolerance | ± 0.3 mm |
thickness tolerance | ± 10 µm |
polishing | double side polished |
roughness | < 0.5 nm (Ra) |
ttv | < 10 µm |
bow | < 60 µm |
flat | according to SEMI (57.5 mm) |
surface | scratch-dig 20-10 according MIL-PRF-13830 |
edge exclusion | 6 mm |
packing | clean room packed under ISO 6 conditions according to ISO 14644 |