Additional information
material | black quartz |
---|---|
diameter | 150 mm |
diameter tolerance | ± 0.2 mm |
thickness | 675 µm |
thickness tolerance | ± 10 µm |
polishing | double side polished |
ttv | < 5 µm |
flat | according to SEMI (57.5 mm) |
edge exclusion | 5 mm |
packing | clean room packed under ISO 6 conditions according to ISO 14644 |