150 mm glass carrier – for Si wafer

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Delivery time: 3-5 days for products in stock

Additional information

material

Borofloat33® glass

cte

3.25 ppm/K (adapted to Si)

diameter

151 mm

diameter tolerance

± 0.1 mm

thickness

705 µm

polishing

double side polished

roughness

< 1 nm (Ra)

bow

< 60 µm

flat

according to SEMI (57.5 mm)

edge exclusion

5 mm

packing

clean room packed under ISO 6 conditions according to ISO 14644

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