Additional information
material | Borofloat33® glass |
---|---|
cte | 3.25 ppm/K (adapted to Si) |
diameter | 151 mm |
diameter tolerance | ± 0.1 mm |
thickness | 705 µm |
polishing | double side polished |
roughness | < 1 nm (Ra) |
bow | < 60 µm |
flat | according to SEMI (57.5 mm) |
edge exclusion | 5 mm |
packing | clean room packed under ISO 6 conditions according to ISO 14644 |