150 mm glass carrier – for chemical release

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Delivery time: 3-5 days for products in stock

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Additional information

material

Borofloat33® glass

cte

3.25 ppm/K (adapted to Si)

diameter

150.2 mm

diameter tolerance

± 0.3 mm

thickness

640 µm

thickness tolerance

± 5 µm

ttv

< 3 µm

flat

according to SEMI (57.5 mm)

edge

according to SEMI M1

surface

perforated

area, filled with holes

D 148 mm

marking

lot & serial number

packing

clean room packed under ISO 6 conditions according to ISO 14644