Carriers are used for thin wafer handling by supporting the device wafer with a rigid carrier during processing. Wafer Universe carriers are reusable for many temporary bonds.

Those carriers made of Borofloat33® glass and SCG72 are perfectly adapted to Silicon and GaAs device wafers due to their similar coefficient of thermal expansion (cte).

CARRIER FOR SI-WAFER

151 mm CARRIER

  • material: Borofloat33® glass
  • diameter: 151.0 ± 0.1 mm
  • cte: 3.25 ppm/K (adapted to Si)
  • thickness: 705 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
  • bow: < 60 μm
  • flat: SEMI (57.5 mm)
  • packaging: cleanroom packed
  • packing units: 10 pcs
  • material data sheet
thickness tolerance (µm) ttv (µm) article number shop
± 3 < 1 CLM-151×0705-B33-01
± 5 < 3 CLM-151×0705-B33-02
± 10 < 5 CLM-151×0705-B33-03

201 mm CARRIER

  • material: Borofloat33® glass
  • diameter: 201.0 ± 0.1 mm
  • cte: 3.25 ppm/K (adapted to Si)
  • thickness: 705 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
  • bow: < 80 μm
  • no notch
  • packaging: cleanroom packed
  • packing units: 10 pcs
  • material data sheet
thickness tolerance (µm) ttv (µm) article number shop
± 3 < 1 CLM-201×0705-B33-01
± 5 < 3 CLM-201×0705-B33-02
± 10 < 5 CLM-201×0705-B33-03

301 mm CARRIER

  • material: Borofloat33® glass
  • diameter: 301.0 ± 0.1 mm
  • cte: 3.25 ppm/K (adapted to Si)
  • thickness: 705 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
  • bow: < 200 μm
  • no notch
  • packaging: cleanroom packed
  • packing units: 10 pcs
  • material data sheet
thickness tolerance (µm) ttv (µm) article number shop
± 5 < 3 CLM-301×0705-B33-02
± 10 < 5 CLM-301×0705-B33-03

CARRIER FOR GaAs

152 mm CARRIER

  • material: SCG72
  • diameter: 152.0 ± 0.2 mm
  • cte: 7.2 ppm/K (adapted to GaAs)
  • thickness: 650 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
thickness tolerance (µm) ttv (µm) article number shop
± 3 < 2 CGA-152×0650-S72-00

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