Additional information
| material | Borofloat33® glass, SCG72 |
|---|---|
| cte | 7,2 ppm/K (adapted to GaAs) |
| diameter | 152 mm |
| diameter tolerance | ± 0.2 mm |
| thickness | 650 µm |
| thickness tolerance | ± 3 µm |
| polishing | single side polished |
| ttv | < 2 µm |
| flat | no flat |
| edge exclusion | 5 mm |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |