Adapter Carrier enable the processing of wafers with various diameter on the same tool. Carrier diameter fits to your processing equipment and allows processing of different wafer diameter without need of expensive equipment change or tool implementation. Due to non conductive material properties whilst avoiding alkaline ions these carriers are suitable for tasks which do not allow conductive materials.

General properties

  • material: Alkaline free Glass
  • thickness: 900 ± 10 µm
  • polishing: double side frosted
  • pocket bottom: frosted
  • no flat in pocket
  • packing units: 3 pcs

150 mm WAFERS

  • diameter: 150.0 ± 0.3 mm
  • SEMI flat /notch: 57.5 mm

with centered pockets:

  • pocket depth: 500 ± 50 µm
  • pocket walls: rounded (approx. 500 µm radius)
pocket diameter* article number
102.0 ± 0.5 mm CAD-150×0900-AFG-40

200 mm WAFERS

  • diameter: 200 ± 0.3 mm
  • SEMI flat /notch: notch

with centered pockets:

  • pocket depth: 500 ±50 µm
  • pocket walls: rounded (approx. 500 µm radius)
pocket diameter* article number
102.0 ± 0.5 mm CAD-200×0900-AFG-40
152.0 ± 0.5 mm CAD-200×0900-AFG-60

300 mm WAFERS

  • diameter: 300 ± 0.3 mm
  • SEMI flat /notch: notch

with centered pockets:

  • pocket depth: 500 ± 50 µm
  • pocket walls: rounded (approx. 500 µm radius)
pocket diameter* article number
152.0 ± 0.5 mm CAD-300×0900-AFG-60
202.0 ± 0.5 mm CAD-300×0900-AFG-80

*at carrier surface

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Additional products

Do you need customization?

Customized designs are available through Plan Optik AG.