Additional information
| material | alkaline free glass |
|---|---|
| diameter | 150 mm |
| diameter tolerance | ± 0.3 mm |
| thickness | 900 µm |
| thickness tolerance | ± 10 µm |
| polishing | double side frosted |
| flat | according to SEMI (57.5 mm) |
with centered pocket |
|
| pocket diameter at carrier surface | 102.0 ±0.5 mm |
| pocket depth | 500 ± 50 μm |
| pocket bottom | frosted |
| pocket walls | rounded (⁓ 500 µm radius) |
| pocket flat | no flat in pocket |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |
