150 mm alkaline free glass adapter carrier

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Delivery time: 3-5 days for products in stock

Categories: , SKU: CAD-150x0900-AFG-40

Additional information

material

alkaline free glass

diameter

150 mm

diameter tolerance

± 0.3 mm

thickness

900 µm

thickness tolerance

± 10 µm

polishing

double side frosted

flat

according to SEMI (57.5 mm)

pocket

with centered pocket

pocket diameter at carrier surface

102.0 ±0.5 mm

pocket depth

500 ± 50 μm

pocket bottom

frosted

pocket walls

rounded (⁓ 500 µm radius)

pocket flat

no flat in pocket

packing

clean room packed under ISO 6 conditions according to ISO 14644