Additional information
material | silicon |
---|---|
diameter | 150 mm |
diameter tolerance | ± 0.3 mm |
thickness | 625 µm |
thickness tolerance | ± 25 µm |
frontside | polished |
backside | etched |
flat | according to SEMI (57.5 mm) |
secondary flat | no secondary flat |
with centered pocket |
|
pocket diameter at carrier surface | 102.0 ±0.5 mm |
pocket depth | 300 ±50 μm |
pocket bottom | frosted |
pocket walls | rounded (⁓ 300 µm radius) |
pocket flat | no flat in pocket |
packing | clean room packed under ISO 6 conditions according to ISO 14644 |