150 mm silicon adapter carrier

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Delivery time: 3-5 days for products in stock

Categories: , SKU: CAD-150x0625-SIL-40

Additional information

material

silicon

diameter

150 mm

diameter tolerance

± 0.3 mm

thickness

625 µm

thickness tolerance

± 25 µm

frontside

polished

backside

etched

flat

according to SEMI (57.5 mm)

secondary flat

no secondary flat

pocket

with centered pocket

pocket diameter at carrier surface

102.0 ±0.5 mm

pocket depth

300 ±50 μm

pocket bottom

frosted

pocket walls

rounded (⁓ 300 µm radius)

pocket flat

no flat in pocket

packing

clean room packed under ISO 6 conditions according to ISO 14644