Additional information
| material | Borofloat33® glass |
|---|---|
| cte | 3.25 ppm/K (adapted to Si) |
| diameter | 151 mm |
| diameter tolerance | ± 0.1 mm |
| thickness | 705 µm |
| polishing | double side polished |
| roughness | < 1 nm (Ra) |
| bow | < 60 µm |
| flat | according to SEMI (57.5 mm) |
| edge exclusion | 5 mm |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |
