Additional information
| material | silicon |
|---|---|
| diameter | 150 mm |
| diameter tolerance | ± 0.3 mm |
| thickness | 625 µm |
| thickness tolerance | ± 25 µm |
| frontside | polished |
| backside | etched |
| flat | according to SEMI (57.5 mm) |
| secondary flat | no secondary flat |
with centered pocket |
|
| pocket diameter at carrier surface | 102.0 ±0.5 mm |
| pocket depth | 300 ±50 μm |
| pocket bottom | frosted |
| pocket walls | rounded (⁓ 300 µm radius) |
| pocket flat | no flat in pocket |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |
