GLASS-ADAPTER CARRIER

Adapter carriers enable the processing of wafers with various diameters on the same tool. The carrier diameter fits your processing equipment and allows processing of different wafer diameters without needing an expensive equipment change or tool implementation. Due to non-conductive material properties whilst avoiding alkaline ions, these carriers are suitable for tasks which do not allow conductive materials.

150 mm WAFERS

material: Alkaline free Glass
diameter: 150.0 ± 0.3 mm
thickness: 900 ± 10 µm
polishing: double side frosted
flat: SEMI (57.5 mm)

with centered pockets:

pocket depth: 500 ± 50 µm
pocket walls: rounded (approx. 500 µm radius)
pocket bottom: frosted
flat: no flat in pocket
packing units: 3 pcs

pocket diameter*	article number	shop
102.0 ± 0.5 mm	CAD-150×0900-AFG-40

200 mm WAFERS

material: Alkaline free Glass
diameter: 200.00 ± 0.3 mm
thickness: 900 ± 10 µm
polishing: double side frosted
notch: SEMI

with centered pockets:

pocket depth: 500 ± 50 µm
pocket walls: rounded (approx. 500 µm radius)
pocket bottom: frosted
flat: no flat in pocket
packing units: 3 pcs

pocket diameter*	article number	shop
102.0 ± 0.5 mm	CAD-200×0900-AFG-40
152.0 ± 0.5 mm	CAD-200×0900-AFG-60

300 mm WAFERS

material: Alkaline free Glass
diameter: 300.00 ± 0.3 mm
thickness: 900 ± 10 µm
polishing: double side frosted
notch: SEMI

with centered pockets:

pocket depth: 500 ± 50 µm
pocket walls: rounded (approx. 500 µm radius)
pocket bottom: frosted
flat: no flat in pocket
packing units: 3 pcs

pocket diameter*	article number	shop
152.0 ± 0.5 mm	CAD-300×0900-AFG-60
202.0 ± 0.5 mm	CAD-300×0900-AFG-80

*at carrier surface

Additional products

Ask for quotation!

Have you found a suitable product? Contact us now for an individual offer.