| material | silicon |
|---|---|
| diameter | 150 mm |
| diameter tolerance | ± 0.2 mm |
| growth | CZ |
| grade | prime |
| type / dopant: | P/Boron |
| orientation: | (100) ±0,5° |
| resistivity | 1-100 Ohm-cm |
| thickness | 675 µm |
| thickness tolerance | ± 25 µm |
| ttv | < 10 µm |
| bow | < 40 µm |
| warp | < 40 µm |
| flat | according to SEMI (57.5 mm) |
| secondary flat | no secondary flat |
| frontside | polished |
| backside | etched |
| marking | without laser marking |
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