Additional information
| material | Borofloat33® glass |
|---|---|
| cte | 3.25 ppm/K (adapted to Si) |
| diameter | 150.2 mm |
| diameter tolerance | ± 0.3 mm |
| thickness | 640 µm |
| thickness tolerance | ± 5 µm |
| ttv | < 3 µm |
| flat | according to SEMI (57.5 mm) |
| edge | according to SEMI M1 |
| surface | perforated |
| area, filled with holes | D 148 mm |
| marking | lot & serial number |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |
