| thickness (μm) | article number | shop |
| 500 | DSP-150×0500-AFG-00 |  |
Wafers from alkaline free glass are characterized by their coefficient of thermal expansion (cte) adapted to silicon and their CMOS compatibility. Furthermore, these wafers can be used in processes up to 600°C and show extraordinary mechanical stability.
Alkaline free glass wafers are often used in sensor technology and as display cover glass as well as in thin glass applications.
150 mm WAFERS
- material: alkaline free glass
- cte: 3.17 ppm/K
- diameter: 150 mm
- diameter tolerance: ± 0.3 mm
- thickness tolerance: ± 10 μm
- polishing: double side polished
- surface roughness (Ra): < 1 nm
- ttv: < 10 μm
- bow: < 60 μm
- flat: according to SEMI (57.5 mm)
- surface: scratch-dig 60-40 according MIL-PRF-13830
- edge exclusion: 6 mm
- packing: clean room packed under ISO 6 conditions according to ISO 14644
- packing units: 10 pcs, 25 pcs
- material data sheet
200 mm WAFERS
- material: alkaline free glass
- cte: 3.17 ppm/K
- diameter: 200 mm
- diameter tolerance: ± 0.3 mm
- thickness tolerance: ± 10 μm
- polishing: double side polished
- surface roughness (Ra): < 1 nm
- ttv: < 10 μm
- bow: < 80 μm
- notch: according to SEMI
- surface: scratch-dig 60-40 according MIL-PRF-13830
- edge exclusion: 6 mm
- packing: clean room packed under ISO 6 conditions according to ISO 14644
- packing units: 10 pcs, 25 pcs
- material data sheet
| thickness (μm) | article number | shop |
| 725 | DSP-200×0725-AFG-00 | |
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