Additional information
| material | Borofloat33® glass |
|---|---|
| cte | 3.25 ppm/K (adapted to Si) |
| diameter | 150 mm |
| diameter tolerance | ± 0.3 mm |
| thickness tolerance | ± 10 µm |
| polishing | double side polished |
| roughness | < 1 nm (Ra) |
| ttv | < 10 µm |
| bow | < 60 µm |
| flat | according to SEMI (57.5 mm) |
| surface | scratch-dig 60-40 according MIL-PRF-13830 |
| edge exclusion | 6 mm |
| packing | clean room packed under ISO 6 conditions according to ISO 14644 |
