Additional information
material | Borofloat33® glass, SCG72 |
---|---|
cte | 7,2 ppm/K (adapted to GaAs) |
diameter | 152 mm |
diameter tolerance | ± 0.2 mm |
thickness | 650 µm |
thickness tolerance | ± 3 µm |
polishing | single side polished |
ttv | < 2 µm |
flat | no flat |
edge exclusion | 5 mm |
packing | clean room packed under ISO 6 conditions according to ISO 14644 |