Carriers are used for thin wafer handling by supporting the device wafer with a rigid carrier during processing. Wafer Universe carriers are reusable for many temporary bonds.

Those carriers made of borosilicate glass and SCG72 are perfectly adapted to Silicon and GaAs device wafers due to their similar coefficient of thermal expansion (cte).

CARRIER FOR SI-WAFER

151 mm CARRIER

  • material: BOROFLOAT33®
  • diameter: 151.0 ± 0.1 mm
  • cte: 3.25 ppm/K (adapted to Si)
  • thickness: 705 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
  • bow: < 60 μm
  • flat: SEMI (57.5 mm)
  • packaging: cleanroom packed
  • packing units: 10 pcs
  • material data sheet
thickness tolerance (µm) ttv (µm) article number shop
± 3 < 1 CLM-151×0705-B33-01
± 5 < 3 CLM-151×0705-B33-02
± 10 < 5 CLM-151×0705-B33-03

201 mm CARRIER

  • material: BOROFLOAT33®
  • diameter: 201.0 ± 0.1 mm
  • cte: 3.25 ppm/K (adapted to Si)
  • thickness: 705 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
  • bow: < 80 μm
  • no notch
  • packaging: cleanroom packed
  • packing units: 10 pcs
  • material data sheet
thickness tolerance (µm) ttv (µm) article number shop
± 3 < 1 CLM-201×0705-B33-01
± 5 < 3 CLM-201×0705-B33-02
± 10 < 5 CLM-201×0705-B33-03

301 mm CARRIER

  • material: BOROFLOAT33®
  • diameter: 301.0 ± 0.1 mm
  • cte: 3.25 ppm/K (adapted to Si)
  • thickness: 705 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
  • bow: < 200 μm
  • no notch
  • packaging: cleanroom packed
  • packing units: 10 pcs
  • material data sheet
thickness tolerance (µm) ttv (µm) article number shop
± 5 < 3 CLM-301×0705-B33-02
± 10 < 5 CLM-301×0705-B33-03

CARRIER FOR GaAs

152 mm CARRIER

  • material: SCG72
  • diameter: 152.0 ± 0.2 mm
  • cte: 7.2 ppm/K (adapted to GaAs)
  • thickness: 650 ± (see product spec)
  • edge exclusion: 5 mm
  • polishing: double side polished
thickness tolerance (µm) ttv (µm) article number shop
± 3 < 2 CGA-152×0650-S72-00

Additional products

BOROSILICATE WAFER

REGULAR POLISHING GRADE

BOROSILICATE WAFER

MDF POLISHING GRADE

ALKALINE FREE GLASS WAFER

Quartz_Wafers

QUARTZ WAFER

SEMICONDUCTOR GRADE
Quartz_Wafers

QUARTZ WAFER

HP FUSED SILICA WAFER

BLACK QUARTZ CARRIER

SI-ADAPTER CARRIER

GLASS-ADAPTER CARRIER

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