MDF polished wafers are treated by an enhanced polishing process (Micro Damage Free). These wafers are specifically developed for chemical patterning processes (wet-etching) leading to higher yield due to reduced defect rate.

Their extremely low sub-nanometer surface roughness makes them ideally suited for direct bonding (fusion bonding).

100 mm WAFERS

  • material: borosilicate glass
  • cte: 3.25 ppm/K (adapted to Si)
  • diameter: 100 mm
  • diameter tolerance: ± 0.3 mm
  • thickness tolerance: ± 10 μm
  • polishing: double side MDF polished
  • surface roughness (Ra): < 0.5 nm
  • ttv: < 10 μm
  • bow: < 30 µm
  • flat: according to SEMI (32.5 mm)
  • surface: sub-surface damaging reduction > 99%
  • edge exclusion: 6 mm
  • packing: clean room packed under ISO 6 conditions according to ISO 14644
  • packing units: 10 pcs, 25 pcs
  • material data sheet
thickness (μm) article number shop
500 MDF-100×0500-B33-00

150 mm WAFERS

  • material: borosilicate glass
  • cte: 3.25 ppm/K (adapted to Si)
  • diameter: 150 mm
  • diameter tolerance: ± 0.3 mm
  • thickness tolerance: ± 10 μm
  • polishing: double side MDF polished
  • surface roughness (Ra): < 0.5 nm
  • ttv: < 10 μm
  • bow: < 60 µm
  • flat: according to SEMI (57.5 mm)
  • surface: sub-surface damaging reduction > 99%
  • edge exclusion: 6 mm
  • packing: clean room packed under ISO 6 conditions according to ISO 14644
  • packing units: 10 pcs, 25 pcs
  • material data sheet
thickness (μm) article number shop
500 MDF-150×0500-B33-00

200 mm WAFERS

  • material: borosilicate glass
  • cte: 3.25 ppm/K (adapted to Si)
  • diameter: 200 mm
  • diameter tolerance: ± 0.3 mm
  • thickness tolerance: ± 10 μm
  • polishing: double side MDF polished
  • surface roughness (Ra): < 0.5 nm
  • ttv: < 10 μm
  • bow: < 80 µm
  • notch: according to SEMI
  • surface: sub-surface damaging reduction > 99%
  • edge exclusion: 6 mm
  • packing: clean room packed under ISO 6 conditions according to ISO 14644
  • packing units: 10 pcs, 25 pcs
  • material data sheet
thickness (μm) article number shop
500 MDF-200×0500-B33-00

Additional products

BOROSILICATE WAFERS

REGULAR POLISHING GRADE

ALKALINE FREE GLASS WAFERS

Quartz_Wafers

QUARTZ WAFERS

SEMICONDUCTOR GRADE
Quartz_Wafers

QUARTZ WAFERS

HP FUSED SILICA

CARRIER WAFER

FOR LASER / MECHANICAL RELEASE

BLACK QUARTZ CARRIER

SI-ADAPTER CARRIER

GLASS-ADAPTER CARRIER

Ask for quotation!

Have you found a suitable product? Contact us now for an individual offer.