Additional information
material | Borofloat33® glass |
---|---|
cte | 3.25 ppm/K (adapted to Si) |
diameter | 150.2 mm |
diameter tolerance | ± 0.3 mm |
thickness | 640 µm |
thickness tolerance | ± 5 µm |
ttv | < 3 µm |
flat | according to SEMI (57.5 mm) |
edge | according to SEMI M1 |
surface | perforated |
area, filled with holes | D 148 mm |
marking | lot & serial number |
packing | clean room packed under ISO 6 conditions according to ISO 14644 |