Wafer Universe expands it’s product range and now offers thin wafers from Borofloat33 and Semiconductor Grade Quartz. This responds to the ongoing trend and increased demand for thin glass substrates. Special CMP technologies enable a reduced thickness down to 200 µm.
These new thin wafers are available up to 200 mm diameter for Borofloat33 and up to 150 mm for Quartz. For the production of these thin wafers Wafer Universe is using it’s own thin wafer handling process based on carriers which are available from it’s standard product portfolio as well. The new thin wafers as well as the mentioned carriers are available off the shelf.
New Borosilicate wafers:
|diameter: 100.0 ± 0.3 mm||diameter: 150.0 ± 0.3 mm||diameter: 200.0 ± 0.3 mm|
|bow: < 30 μm||bow: < 60 μm||bow: < 80 μm|
|SEMI flat /notch: 32.5 mm||SEMI flat /notch: 57.5 mm||SEMI flat /notch: Notch|
|thickness: 200 μm||thickness: 200 μm||thickness: 200 μm|
|article number: DSP-100×0200-B33-00||article number: DSP-150×0200-B33-00||article number: DSP-200×0200-B33-00|
New Semiconductor Grade Quartz Wafers:
|diameter: 100.0 ± 0.3 mm||diameter: 150.0 ± 0.3 mm|
|bow: < 30 μm||bow: < 60 μm|
|SEMI flat /notch: 32.5 mm||SEMI flat /notch: 57.5 mm|
|thickness: 200 μm||thickness: 200 μm|
|article number: DSP-100×0200-SGQ-00||article number: DSP-150×0200-SGQ-00|