| thickness (μm) | article number |
| 300 | DSP-100×0300-SGQ-00 |
| 525 | DSP-100×0525-SGQ-00 |
| 675 | DSP-100×0675-SGQ-00 |
| 1000 | DSP-100×1000-SGQ-00 |
Wafers from semiconductor grade quartz (amorphous) are used in semiconductor processing, solar and industrial applications as well as for thin film coatings. Main feature is the high chemical purity making it a CMOS compatible material combined with excellent mechanical and optical properties.
Semiconductor grade quartz features low cte as well as low OH content which enables high temperature processing and good transmission in IR and UV. This material is top notch when it comes to high quality quartz wafers with reasonable pricing.
General properties
- material: semiconductor grade quartz
- thickness tolerance: ± 10 μm
- edge exclusion: 6 mm
- polishing: double side polished
- surface roughness (Ra): < 0.5 nm
- ttv: < 10 μm
- scratch-dig: 20-10
- cte: 0.59 ppm/K
- packaging: cleanroom packed
- packing units: 10 pcs, 25 pcs
- material data sheet
100 mm WAFERS
- diameter: 100.0 ± 0.3 mm
- SEMI flat /notch: 32.5 mm
150 mm WAFERS
- diameter: 150.0 ± 0.3 mm
- bow: < 60 μm
- SEMI flat /notch: 57.5 mm
| thickness (μm) | article number |
| 300 | DSP-150×0300-SGQ-00 |
| 525 | DSP-150×0525-SGQ-00 |
| 675 | DSP-150×0675-SGQ-00 |
| 1000 | DSP-150×1000-SGQ-00 |
200 mm WAFERS
- diameter: 200.0 ± 0.3 mm
- bow: < 80 μm
- SEMI flat /notch: Notch
| thickness (μm) | article number |
| 300 | DSP-200×0300-SGQ-00 |
| 525 | DSP-200×0525-SGQ-00 |
| 675 | DSP-200×0675-SGQ-00 |
| 1000 | DSP-200×1000-SGQ-00 |
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